Fundamental Principles of Optical Lithography: The Science of Microfabrication ISBN 9789036827287 It is suitable for users

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Fundamental Principles of Optical Lithography: The Science of Microfabrication ISBN 9789036827287 It is suitable for usersThe Science of Microfabrication In Chris Mack offers a thorough description of optical lithography, aimed at students and researchers in microfabrication. This study book covers fundamental principles and practical applications, including theoretical background and simulation exercises. Description Microfabrication of integrated circuits requires various processes such as thin film deposition, patterning, and doping of semiconductors. Optical